It's assumed that in some instances, secondary thermal ALD reactions through the gaseous by-merchandise may result in an seemingly improved conformality than could be reached which has a “pure” plasma system. For instance, experimental film thickness profiles acquired for PE-ALD of Al2O3 by Dendooven et al. Overview of multiscale modelling https://lanedlogi.theisblog.com/20175541/atomic-layer-deposition-for-dummies